In a lithographic process suitable for use in the manufacture of electronic components, oxidative reactions are employed to reproducibly fabricate patterns having micro- or nano-scale dimensions. An electrically-conductive template is fabricated to have a nanometer-scale sharp edge and describe a pattern having a micron-scale length. The oxidative reaction is mediated by a water meniscus connecting the sharp edge of the template and an oxidizable substrate. One suitable substrate is graphene. The template can be controllably positioned using a light lever method.
Full Patent: A High-Throughput Local Oxidation Nanopatterning Process
FY09-024
Materials / Manufacturing & Processes
Eui-Hyeok Yang Kitu Kumar
David Zimmerman Director of Technology Commercialization Stevens Institute of Technology dzimmer3@stevens.edu
